Nov 3, 1971 ... Data from measurements made with a plasma caused by a DC discharge over a 380-Mc slot antenna are prosented, illustrating this effect. Ways to improve ...... and Herlin and Brown. 1 In coaxial lines the radial field varies. 21 ... A Circularly Polarized Radial Line Dielectric Resonator Antenna Array The radial line slot antenna (RLSA) is a slotted waveguide planar antenna, which ... [5], which proves feasible in using radial line waveguide to feed the antenna .... Application,” IEEE Transactions on Plasma Science., vol. 43, pp. 3527. - 3529 ... OSA | Generation of vectorial optical fields with slot-antenna-based ... Acting as local linear polarizers, these slot antennas enable the spatial modulation of optical fields in amplitude, phase, and polarization for the cross- polarized ...
FIG. 3 a illustrates conceptually the method the invention uses to mitigate the antenna blockage problem discussed with reference to FIG. 1 a. The antenna originally used on the aircraft 1 is replaced with a Artificial Impedance Surface …
Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a Radial line slot antenna having a conductive layer - Tokyo May 10, 2011 · The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma Simulation of microwave pulsing in a radial line slot
FIELD OF THE INVENTION. The invention relates to plasma processing with microwave (MW) plasmas, particularly surface wave plasmas (SWP), for example as produced with a radial line slot antenna, and more particularly, to a method and apparatus providing relatively low electron temperature and plasma uniformity
Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. A Model for Antenna-Plasma Wave Co upling towards Control ... A Model for Antenna-Plasma Wave Co upling towards Control of Uniformity in Slot-Excited Microwave Discharges Daichi SAWADA, Akihiro TSUJI, Takanori KITSUDO, Yasuyoshi YASAKA, and Hiromasa TAKENO Department of Electrical and Electronic Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan Exploration COMSOL in Modeling RLSATM CVD Processes Radial line slot antenna plasma source Plasma is sustained by 2.45 GHz EM wave distributed by antenna and propagating trough processing gas 3 . Author / Company / Division / Rev. / Date Physics background • SW-sustained discharges are structures which unify Multiphysics Coupling Simulation of Silicon Nitride CVD ...
A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field.
Radial Line Slot Antenna A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA isConcentric slot pairs arranged RLSA. Wide-Band RLSA. 60GHz Wireless LAN System. Microwave Plasma Etching System & Plasma CVD for the... Beam broadened radial line slot array antenna for... Characteristics of a Radial Line Slot Antenna for 12 GHz Band Satellite TV Reception. IEEE Transactions on Antennas and Propagation.High Gain Radial Line Slot Antennas for Millimetre Wave Applications," IEE Proceedings Microwaves, Antennas and Propagation.
Scilit | Article - Conformal doping of topographic silicon…
Multiphysics Coupling Simulation of Silicon Nitride CVD ... The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed.
Floating potential measurements in the near field of an ion ... Characteristics of large-diameter plasma using a radial-line slot antenna J. Vac. Sci. Technol. A 24, 1421 (2006) Outgassing of lower hybrid antenna modules during high-power long-pulse transmission J. Vac. Sci. Technol. A 23, 55 (2005) High-density etching plasma excitation by slot type and coaxial line type of microwave antennas